Linde LienHwa, a member of The Linde Group invests in local production of electronic special gases (ESGs). This enhances its portfolio to meet the growing demand of Taiwanese and regional customers in the semiconductor and display industries. LLH is leveraging access to global expertise to build first-in-kind capabilities in Taiwan to innovate locally for customers.
C4F8 purification at Taichung Harbor
Linde LienHwa’s capability for purification and filling of C4F8 in Taichung Harbor is outstanding in Taiwan. With over 100 tons per year of capacity, Linde LienHwa is positioned to meet demand in Taiwan as well as serve customers throughout Asia. An etching gas, C4F8 enables semiconductor manufacturers to cut chip patterns at leading-edge dimensions and also create the conduits through which several chips can be electrically connected. In addition, C4F8 is used to clean production chambers in predominantly older-sized semiconductor tools.
HCDS at Guanyin
Another step forward in Taiwan is Linde LienHwa’s transfilling facility for hexachlorodisilane (HCDS) in Guanyin, a district of Taoyuan City. The transfill process involves repackaging material into specialized stainless-steel vessels while improving the purity and validating the quality. This Linde LienHwa investment is sized to serve both Taiwan and customers throughout Asia. HCDS is used for depositing silicon compounds at very low process temperatures, which is important for making nanoscale electrical insulators in memory and logic processor chips.